CMP Lapping Machine-Shenzhen Tengyu Grinding Technology Co., Ltd.

Product Details

Equipment Features:：

1. This is a single-side precision Lapping Machine. It adopts advanced mechanical structure and control method, and has high polishing efficiency and stable operation.

2. The whole machine adopts PLC+touch screen control system, Equipment parameters can be set here, which is easy to operate.

3. The main motor adopts variable frequency speed control to realize the soft start and soft stop of the main engine.

4. The cylinder pressurization method is adopted, and the closed-loop control of the pressure is realized through the control of the electric proportional valve, which ensures extremely high pressure application accuracy and stability.

5. The Vacuum chuck is driven by a servo motor to ensure the uniformity of polishing at each station on the premise of ensuring the polishing rate of the product.

6.Both the polishing plate and the upper pressure plate are equipped with cooling water cooling function.It ensures the maximum efficiency of the polishing liquid and reduces the deformation of the polishing disc surface.

7.The equipment is equipped with a Lap plate correction device, and the flatness range of the plate surface after correction is 0.005-0.008mm.

Main Technical Parameters：

Model	TY-7104XA	TY-8104XA	TY-9104XA
Specification Of Plate	700x250x12mm	810x255x12mm	910x250x12mm
Ceramic Plate Diameter	240~260mm	305mm	360mm
Main Motor Power	5.5KW/380V	7.5KW/380V	7.5KW/380V
Pressure Plate Motor Power	0.4KW/380Vx4	0.4KW/380Vx4	0.4KW/380Vx4
Correction Device Motor Power	0.2KW/380V	0.2KW/380V	0.2KW/380V
Main Motor Speed	10-100rpm(max)	5-90rpm(max)	5-90rpm(max)
Workstation	4个	4个	4个
Modify Grinding Plate Mode	Automatic correction	Automatic correction	Automatic correction
Overall Dimensions	1050x1950x2300mm	1200x2200x2500mm	1200x1800x2300mm
Weight	2100KG	2350KG	2500KG

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