CMP Polishing Machine-Shenzhen Tengyu Grinding Technology Co., Ltd.

Product Details

What are the advantages of the machine？

1. This is a single-side precision polishing equipment. It adopts advanced mechanical structure and control method, and has high polishing efficiency and stable operation.

2. The whole machine adopts PLC+touch screen control system, Equipment parameters can be set here, which is easy to operate.

3. The main motor adopts variable frequency speed control to realize the soft start and soft stop of the main engine.

4. The cylinder pressurization method is adopted, and the closed-loop control of the pressure is realized through the control of the electric proportional valve, which ensures extremely high pressure application accuracy and stability.

5. The Vacuum chuck is driven by a servo motor to ensure the uniformity of polishing at each station on the premise of ensuring the polishing rate of the product.

6. Both the polishing plate and the upper pressure plate are equipped with cooling water cooling function.

7. It ensures the maximum efficiency of the polishing liquid and reduces the deformation of the polishing disc surface.

Technical Specifications:

Model	TY-7104PA	TY-8104PA	TY-9104PA
Lap Plate Diameter	Φ700mm	810mm	910mm
Block size	Φ260mm	Φ305mm	Φ360mm
Suitable Wafer Size	3,4,6,8inch	4,6,8,12inch	6,8,12inch
Plate cooling	Cooling water jacket	Cooling water jacket	Cooling water jacket
P. Plate	4 axles. (driving force system individually)	4 axles. (driving force system individually)	4 axles. (driving force system individually)
Applied pressure	By cylinder	By cylinder	By cylinder
Pressure range	30~150kg	30~150kg	30~150kg
Plate Speed	5~80rpm	5~80rpm	5~80rpm
Power of Main Motor	4KW /AC380V, 3Phase, 60Hz	7.5KW//AC380V, 3Phase, 60Hz	7.5KW//AC380V, 3Phase, 60Hz
Pneumatic	0.5~0.8 Mpa	0.5~0.8 Mpa	0.6~0.8 Mpa
Overall Dimensions	120017002300mm	≈1150x1050x2200mm	≈1250x1150x2200mm
Weight	2500kg	2800KG	2350KG
Controller	Touch Screen (Proface)	Touch Screen (Proface)	Touch Screen (Proface)

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