Suitable for mass production of AR coating.
FEATURES：
1.Excellent uniformity by the center drive substrate rotation system.
2. Shortened coating tact time achieved by higher performance in pumping and heating.
3.Optical monitor, DC ion source, and Resistance heater evaporation source can be optionally installed.
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Specifications of Gener-1315
|
Chamber Size |
SUS304, φ1300 mm × 1500 mm (H) |
|
Substrate Dome |
Four-sectional Dome (or φ1200 mm) |
|
Max. Dome Rotation Speed |
30 rpm (Variable) |
|
Crystal Film Thickness Monitor |
XTC/3 plus 6-point rotary sensor |
|
Evaporation Source |
One unit of EB source |
|
Performance |
|
|
Ultimate Pressure |
7.0 × 10-5 Pa or lower |
|
Pumping Speed |
10 min (from atmospheric pressure to 3.0 × 10-3 Pa) |
|
Max. Substrate Heating Temp. |
350 ゜C |
|
Utility Requirements |
|
|
Footprint |
4500 mm (W) × 6000 mm (D) × 3200 mm (H) |
|
Power Supply |
3-phase, 200 V, 50/60 Hz, 80 kVA, approx. |
|
Minimum Water Flow |
100 /min |
|
Air Pressure |
0.5 - 0.7 MPa |
|
Weight |
6500kg, approx. |
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