OTFC Series
（For Edge Filters, Band Pass Filters, AR Coatings, etc.）
OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical
filters such as edge filters, band pass filters etc.
FEATURES
1. Chamber size: φ600mm- φ1800mm
2. 60-point optical thickness monitor.
3. RF ion source achieving uniformed, larger ion beam distribution over a larger area at high ion current density.
4. Over 100 layers can be deposited by 2 EB guns and multi-point crucible hearth or annular hearth.
5. Auto-deposition control system for fully automated process.
6. Center-driving or planetary substrate dome is selectable.
7. Diffusion pumps plus Polycold or Cryo- pumps.
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Examples of Special Coatings
Specifications of OTFC Series
|
Model |
OTFC-9013CBI/DBI |
OTFC-1115CBI/DBI |
|
Vacuum Chamber |
SUS304, φ900mm × 1300mm (H) |
SUS304, φ1100mm × 1520mm (H) |
|
Substrate Dome Size |
φ790mm |
φ950mm |
|
Substrate Dome Rotation Speed |
10 rpm to 30 rpm (Variable) |
10 rpm to 50 rpm (Variable) |
|
Optical Film Thickness Control System |
HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm |
HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm |
|
Crystal Film Thickness Monitor |
XTC/3 plus 6-point rotary sensor |
XTC/3 plus 6-point rotary sensor |
|
Evaporation Source |
EB source: 2 units |
EB source: 2 units |
|
Ion Source |
10cm RF Ion Source |
17cm RF Ion Source |
|
Vacuum System |
Roughing Pump, Diffusion Pump + Meissner chiller Or Cryo Pump + Cryo Trap |
Roughing Pump, Diffusion Pump + Meissner chiller Or Cryo Pumps + Cryo Trap |
|
Performance |
|
|
|
Ultimate Pressure |
7.0 × 10-5Pa or lower |
7.0 × 10-5Pa or lower |
|
Pump Down Rate |
15 min (Atm. to 1.3 × 10-3Pa) |
15 min (Atm. to 1.3 × 10-3Pa) |
|
Substrate Heater |
350℃ (max.) |
350℃ (max.) |
|
Utility |
|
|
|
Footprint |
4500mm (W) × 5500mm (D) × 3200mm (H) approx. |
5000mm (W) × 6000mm (D) × 3300mm (H) approx. |
|
Power Supply |
3-phase, 200V, 50/60Hz, 80kVA approx. |
3-phase, 200V, 50/60Hz, 100kVA approx. |
|
Cooling Water Flow Rate |
80 Q /min or greater |
120 Q /min or greater |
|
Compressed Air Pressure |
0.5MPa or greater |
0.5MPa or greater |
|
Gross Weight |
5400kg approx. |
7200kg approx. |
|
OTFC-1316CBI/DBI |
OTFC-1518CBI/DBI |
OTFC-1819CBI/DBI |
|
SUS304, φ1300mm × 1610mm (H) |
SUS304, φ1550mm × 1800mm (H) |
SUS304, φ1800mm × 1920mm (H) |
|
φ1130mm |
φ1400mm |
φ1600mm |
|
10 rpm to 50 rpm (Variable) |
10 rpm to 30 rpm (Variable) |
10 rpm to 30 rpm (Variable) |
|
HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm |
HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm |
HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm |
|
XTC/3 plus 6-point rotary sensor |
XTC/3 plus 6-point rotary sensor |
XTC/3 plus 6-point rotary sensor |
|
EB source: 2 units |
EB source: 2 units |
EB source: 2 units |
|
17 cm RF ion source |
17 cm RF ion source |
23 cm RF ion source |
|
Roughing Pump, Diffusion Pump + Meissner chiller |
Roughing Pump, Diffusion Pump + Meissner chiller |
Roughing Pump, Diffusion Pump + Meissner chiller |
|
Or Cryo Pumps + Cryo Trap |
Or Cryo Pumps + Cryo Trap |
Or Cryo Pumps + Cryo Trap |
|
*Option: Turbomolecular pump selectable |
*Option: Turbomolecular pump selectable |
*Option: Turbomolecular pump selectable |
|
7.0 × 10-5Pa or lower |
7.0 × 10-5Pa or lower |
7.0 × 10-5Pa or lower |
|
15 minutes (Atm. to 1.3 × 10-3Pa) |
15 minutes (Atm. to 1.3 × 10-3Pa) |
20 min (Atm. to 1.3 × 10-3Pa) |
|
350℃ (max.) |
350℃ (max.) |
350℃ (max.) |
|
5000mm (W) × 6500mm (D) × 3500mm (H) approx. |
5500mm (W) × 7200mm (D) × 3700mm (H) approx. |
5700mm (W) × 7700mm (D) × 4000mm (H) approx. |
|
3-phase, 200V, 50/60Hz, 100kVA approx. |
3-phase, 200V, 50/60Hz, 120kVA approx. |
3-phase, 200V, 50/60Hz, 150kVA approx. |
|
140 Q /min. or greater |
180 Q /min or greater |
180 Q /min or greater |
|
0.5MPa or higher |
0.5MPa or greater |
0.5MPa or greater |
|
8500kg approx. |
10000kg approx. |
11200kg approx. |
Specifications may be subject to change without notice.
Customized Optical Thin Film Coater
Optical Thin Film Coater with planetary dome
This optical thin film coater is equipped with a planetary dome and ion source is suitable for coating a reflector and lenses with high curvature.
FEATURES
1. Planetary dome improves coating uniformity over substrate.
2. Dome angle can be inclined in accordance with lens curvature.
3. IAD system greatly improves film quality.
4. High precision spectrum property at spherical substrate can be obtained at high accuracy by optical monitor.
5. Large size chamber (1800 mm in diameter) with planetary dome increases productivity.
Optical Thin Film Coater for coating on plastic substrates
This optical thin film coater is newly designed for coating at plastic substrate .Our unique technology allows making coatings on various plastic substrates such as PMMA, Polycarbonate,Zeonex,etc
FEATURES
1. Optimum design for coating on plastic substrates
2. High quality optical films produced on plastics by special coating processes.
3. Passed strict environmental tests.
4. Automatic coating processes achieved by ACS program.
Optical Thin Film Coater for IR filters
This optical thin film coater is newly designed for infrared filter coating. Optical thickness is monitored and controlled in wavelength range covering 1700 - 5500nm.
FEATURES
1. Optical film thickness monitor: Wavelength Range = 1700 - 5500nm; Wavelength Resolution = 3 - 50nm (Tunable)
2. Optical film thickness monitor; Light intensity stability ≤ ± 0.05% in IR range.
3. Particularly optimized for deposition of high-quality infrared filters having high optical performance with high reproducibility
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